摘要 : In this work, KrF excimer laser irradiation of n-type SiC is used to form Ohmic contacts at the interfaces between the irradiated SiC and various types of metals with different work functions without subsequent thermal annealing. ... 展开
作者 | Wu~ Yan Ji~ Lingfei Lin~ Zhenyuan Hong~ Minghui Wang~ Sicong Zhang~ Yongzhe |
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作者单位 | |
期刊名称 | 《Current applied physics: the official journal of the Korean Physical Society》 |
总页数 | 7 |
语种/中图分类号 | 英语 / O59 |
关键词 | SiC Ohmic contact Excimer laser Barrier height |
馆藏号 | N2009EPST0000266 |