摘要 : In this brief, a parasitic capacitance model for a finite single three-dimensional (3-D) wire above an infinite plate is developed based on electric field decomposition (EFD). The capacitance components at wire ends, i.e., the 3-D... 展开 In this brief, a parasitic capacitance model for a finite single three-dimensional (3-D) wire above an infinite plate is developed based on electric field decomposition (EFD). The capacitance components at wire ends, i.e., the 3-D terminal and terminal fringe capacitance, are considered by the 3-D electric field analysis. Verified by extensive COMSOL simulations, the model can accurately predict parasitic capacitance for a wide range of 3-D BEOL wire dimensions. 收起