摘要 : Shortening the Cu gap-filling time at microvias by electrodeposition is critical for increasing the productivity of printed circuit board (PCB) fabrication. Additives that can facilitate accelerated Cu bottom-up filling should be ... 展开
作者 | Lee~ Yoonjae Kim~ Jung Ah Jeon~ Youngkeun Kim~ Myung Jun Lee~ Myung Hyun Kim~ Young Gyu Kim~ Jae Jeong |
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作者单位 | |
期刊名称 | 《Electrochimica Acta》 |
总页数 | 8 |
语种/中图分类号 | 英语 / TQ15 O64 |
关键词 | Microvia Bottom-up filling Cu electrodeposition Leveler Quaternary ammoniums COPPER ELECTRODEPOSITION POLYETHYLENE-GLYCOL MOLECULAR-WEIGHT SAFRANINE T SUPPRESSOR ADDITIVES SILICON ADSORPTION COPOLYMER CHLORIDE |
馆藏号 | N2008EPST0003775 |