摘要: In this paper, novel low loss, wide-band coplanar stripline technology for radio frequency (RF)/microwave integrated circuits is demonstrated on high resistivity silicon wafer. In particular, the fabrication process for the deposi... 展开
作者 | Simons, R. N. Goverdhanam, K. Katehi, L. P. B. | ||
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原报告号 | N20010068558 | 总页数 | 10 |
主办者 | Office of Naval Research, Washington, DC. | ||
报告类别/文献类型 | NASA / NTIS科技报告 | ||
关键词 | Meetings Integrated circuits Microwave circuits Fabrication Broadband Waveguides Etching Radio frequencies |