摘要 : The problems of the traditional type grating angular displacement encoder make it difficult to balance the measurement performance of miniaturization, high precision and high resolution, and the ability to resist vibration and sho... 展开
作者 | Xu Gao Xuebin Zhang |
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作者单位 | |
页码/总页数 | 18631-18638 / 8 |
语种/中图分类号 | 英语 / TP212 |
关键词 | Sensors Capacitance Capacitors Displacement measurement Rotors Integrated circuit modeling Demodulation |
DOI | 10.1109/JSEN.2022.3200099 |
馆藏号 | IELEP0232 |