摘要 : This paper studies the effect of the generation-loss processes in the plasma-sheath region close to a probe immersed in an oxygen discharge considering a three-fluid model for the charged species. A significant deviation from the ... 展开
作者 | R Morales Crespo E Mu?oz-Serrano A Tejero-del-Caz E Casado |
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作者单位 | |
期刊名称 | 《Plasma Sources Science & Technology》 |
总页数 | 9 |
语种/中图分类号 | 英语 / O53 |
关键词 | sheaths electronegative plasma oxygen discharge attachment detachment recombination collisions |
馆藏号 | N2008EPST0011348 |