摘要: JSEP research has yielded two new laser microprobes for use in electronics fabrication. The development of such probes is increasingly important because of the need for precision in situ monitoring in advanced electronics fabricat... 展开
作者 | Flynn, G. W. Osgood, R. M. | ||
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原报告号 | ADA217460 | 总页数 | 96 |
主办者 | Non Paid ADAS NSF General | ||
报告分类号 | [ 46H - Radiofrequency Waves, 46C - Optics &, Lasers] | ||
报告类别/文献类型 | AD / NTIS科技报告 | ||
关键词 | Electromagnetic spectra Laser beams Photoelectric emission Beam splitting Diagnosis(General) Dielectrics Doping Fabrication High rate Laser spots Microprobes Microscopes Optical equipment components Optics Poisson density functions Quantum theory Raman spectroscopy Resolution Scanning Semiconductors Silicon Spatial distribution Ultraviolet lasers |