[科技报告]AD  Flynn, G. W., Osgood, R. M.96

摘要: JSEP research has yielded two new laser microprobes for use in electronics fabrication. The development of such probes is increasingly important because of the need for precision in situ monitoring in advanced electronics fabricat... 展开

翻译摘要
作者 Flynn, G. W.   Osgood, R. M.  
原报告号 ADA217460 总页数 96
主办者 Non Paid ADAS NSF General
报告分类号 [ 46H - Radiofrequency Waves, 46C - Optics &amp, Lasers]
报告类别/文献类型 AD / NTIS科技报告
关键词 Electromagnetic spectra   Laser beams   Photoelectric emission   Beam splitting   Diagnosis(General)   Dielectrics   Doping   Fabrication   High rate   Laser spots   Microprobes   Microscopes   Optical equipment components   Optics   Poisson density functions   Quantum theory   Raman spectroscopy   Resolution   Scanning   Semiconductors   Silicon   Spatial distribution   Ultraviolet lasers  
相关作者
相关关键词