摘要 : We present a technique for measuring the microlens radius of curvature (ROC). The technique is based on the principle of three-dimensional (3-D) surface topography using a white light interference microscope. By measuring 3-D poin... 展开
作者 | Nhue Nguyen Phan Hai Hoang Le Dung Chi Duong |
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作者单位 | |
期刊名称 | 《Optical engineering》 |
页码/总页数 | 75-81 / 7 |
语种 | 英语 |
关键词 | sphere radius measurement white-light interference three-dimensional surface topography optical metrology |
DOI | 10.1117/1.OE.58.12.124105 |
馆藏号 | TH-013 |