摘要 : A growth of single crystal diamond (SCD) microchannels on HPHT diamond substrate has been carried out successfully by a simple and novel method. Firstly, aluminum film was patterned on SCD diamond substrate surface by magnetron sp... 展开
作者 | Fu~ Jiao Liu~ Zongchen Zhu~ Tianfei Zhang~ Minghui Zhang~ Xiaofan Shao~ Guoqing Liu~ Zhangcheng Wang~ Yanfeng Zhao~ Dan Chang~ Xiaohui Liang~ Yan Wang~ Juan Zhang~ Jingwen Wang~ Hong-Xing |
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作者单位 | |
期刊名称 | 《Microfluidics and nanofluidics》 |
页码/总页数 | 92.1-92.5 / 5 |
语种/中图分类号 | 英语 / TP |
关键词 | Single crystal diamond Epitaxial lateral overgrowth Microchannels Microfluidic systems |
DOI | 10.1007/s10404-018-2114-9 |
馆藏号 | TP-459 |