[机翻] 甲烷压力对脉冲等离子体增强化学气相沉积纳米碳颗粒尺寸的影响
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  • 《Plasma processes and polymers》 2009年6卷Suppl 1期

摘要 : <h3>Abstract</h3><div class="para"><p>The nanoparticles of carbon were deposited from methane under the potential of a pulsed direct current discharge. The deposition was carried without external heating. The size, chemistry, and ... 展开

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