摘要 : Active polarizers that consist of parallel metal wires are fabricated by silicon micromachining techniques. If wavelength of incident radiation is larger than the period of the wire grid, the wire grid reflects incident radiation ... 展开 Active polarizers that consist of parallel metal wires are fabricated by silicon micromachining techniques. If wavelength of incident radiation is larger than the period of the wire grid, the wire grid reflects incident radiation with the electric field parallel to the grid line, while transmits the other. Polarization of infrared light can be succussfully modulated by changing the period of the grid or changing the geometrical configuration. Two kinds of silicon structures are fabricated and demonstrated. On of them is electrostatic driven structure composed of mechanically flexible grid. The period of the grid can be modulated by itself with electrostatic actuation. 收起