摘要 : We have developed a thermal microscope which has an InSb detector and optics optimized for the camera. Using this system, we evaluated maximum resolution of a 30x/numerical aperture 0.71 lens made of silicon and germanium, and ach... 展开 We have developed a thermal microscope which has an InSb detector and optics optimized for the camera. Using this system, we evaluated maximum resolution of a 30x/numerical aperture 0.71 lens made of silicon and germanium, and achieved the cutoff frequency of around 300 line pairs/mm, which is almost a diffraction-limited performance. The thermal microscope is installed on the THEMOS-1000, a product of Hamamatsu Photonics, for thermal emission analysis. 收起