摘要 : We have developed a thermal microscope which has an InSb detector and optics optimized for the camera. Using this system, we evaluated maximum resolution of a 30×/numerical aperture 0.71 lens made of silicon and germanium, and ach... 展开
作者 | Ikuo Arata Yoshio Isobe Toshimichi Ishizuka |
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作者单位 | |
期刊名称 | 《Optical Review》 |
页码/总页数 | 123-125 / 3 |
语种 | 英语 |
关键词 | thermal imaging thermal microscopy thermal emission analysis InSb failure analysis semiconductor |
DOI | 10.1007/s10043-009-0020-9 |
馆藏号 | E139EP00567 |