国际刊号:
1057-7157
出版周期:
Quarterly;Bimonthly
序号 | 标题 | 作者 | 起始页 | 操作 |
---|---|---|---|---|
1 | Front Cover | |||
2 | Journal of Microelectromechanical Systems | |||
3 | Table of Contents | |||
4 | 2023 Reviewers List | 1 | ||
5 | Sealed-Cavity Bulk Acoustic Resonator for Subsequent Fabrication and Higher Order Mode | Jiashuai Xu, Zong Liu, Junyan Zheng... | 3 | |
6 | Response Speed Characterization of a Thermally Actuated Programmable Metamaterial | Chenyang Luo, Jonathan B. Hopkins, Michael A. Cullinan | 6 | |
7 | A Near-Zero Thermoelectric RF Power Sensor for High Dynamic Range Applications | Zhiqiang Zhang, Runqi Gu, Yifei Jiang... | 9 | |
8 | Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer | Fangzheng Li, Dandan Liu, Le Gao... | 12 | |
9 | Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors | Almur A. S. Rabih, Seyedfakhreddin Nabavi, Michaël Ménard... | 21 | |
10 | 3D Flexible Wind Sensor With its Optimization and Environmental Effect | Zhenxiang Yi, Yu Wan, Ming Qin... | 37 |