摘要 : This focuses on developing a new platform for the thin-film bulk acoustic wave (BAW) resonator, which features predefined sealed cavities, self-formed acoustic boundaries, and compatibility with subsequent fabrication. Different f... 展开
作者 | Jiashuai Xu Zong Liu Junyan Zheng Fangsheng Qian Man Wong Yansong Yang |
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作者单位 | |
页码/总页数 | 3-5 / 3 |
语种/中图分类号 | 英语 / TN4 |
关键词 | Silicon Fabrication Etching Optical resonators Film bulk acoustic resonators Scandium Aluminum nitride Bulk acoustic wave devices |
DOI | 10.1109/JMEMS.2023.3338250 |
馆藏号 | IELEP0163 |