摘要 : Current diagnosing phase shifting interferometry is a time and funds consuming process. Hence a brief and effective method is necessary to satisfy the real-time testing. In this paper, mathematical solutions for errors were deduce... 展开 Current diagnosing phase shifting interferometry is a time and funds consuming process. Hence a brief and effective method is necessary to satisfy the real-time testing. In this paper, mathematical solutions for errors were deduced from the difference of intensity patterns. Based on the diversity of error distributions, an effective method for distinguishing and diagnosing the error sources is proposed and verified by an elaborative designed simulation. In the actual comparison experiment, vibration, phase-shift error and intensity fluctuation were imposed to demonstrate this method. The results showed that this method can be applied into the real-time measurement and provide an in situ diagnosing technique. 收起