摘要 : The present paper reports on target erosion as one of the crucial parameters influencing the cluster size distribution. Size distributions of nanosized Cu clusters produced by a DC magnetron sputtering source during the lifetime o... 展开
作者 | Ganeva~ M. Pipa~ A.V. Hippler~ R. |
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作者单位 | |
期刊名称 | 《Surface & Coatings Technology》 |
总页数 | 7 |
语种/中图分类号 | 英语 / TG17 |
关键词 | Cluster formation Copper Gas aggregation Magnetron sputtering Nanoclusters |
馆藏号 | N2008EPST0006757 |