摘要: A 5 x 40 cm rectangular-beam ion source was designed and fabricated. A multipole field configuration was used to facilitate design of the modular rectangular chamber, while a three-grid ion optics system was used for increased ion... 展开
作者 | Haynes, C. M. | ||
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原报告号 | N81-24877 | 总页数 | 106 |
报告类别/文献类型 | NASA / NTIS科技报告 | ||
关键词 | Electron bombardment Ion beams Ion sources Sputtering Apertures Current density Electrodes Energy dissipation Mathematical models Multipoles Optical properties Rectangles |