摘要 : This paper describes the deposition of diamond and diamond-like carbon coatings using the Circumferencial Antenna Plasma (CAP) reactor. Carbon coatings were deposited at pressures of 8000, 5000 and 3300 Pa onto silicon wafers. The... 展开
作者 | M.L. McConnell D.P. Dowling C. Pope K. Donnelly A.G. Ryder G.M. O'Connor |
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作者单位 | |
期刊名称 | 《Diamond and Related Materials》 |
总页数 | 5 |
语种/中图分类号 | 英语 / TQ16 TQ127 TQ164 |
关键词 | microwave diamond-like carbon diamond plasma |
馆藏号 | N2008EPST0008224 |