摘要 : © 2024 Elsevier LtdTime-dependent dielectric breakdown (TDDB) is commonly used to assess dielectric failures. However, TDDB provides limited insights into the physics of dielectric degradation. In this paper, we explore the potent... 展开
作者 | Saini N. Tierno D. Croes K. Afanas'ev V. Houdt J.V. |
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作者单位 | |
期刊名称 | 《Solid-state electronics》 |
页码/总页数 | 1.1-1.5 / 5 |
语种/中图分类号 | 英语 / TN |
关键词 | PEALD Al2O3 Reliability RTN TDDB |
DOI | 10.1016/j.sse.2024.108877 |
馆藏号 | TN-149 |