摘要 : In the design and reliability analysis of SiC capacitive pressure sensors (CPSs), the complex and harsh working environment causes irregular deformation of the sensors, which makes it difficult to analyze the capacitance. In addit... 展开
作者 | Chengyi Liu Jiangfeng Du Limei Rong Qi Yu |
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作者单位 | |
期刊名称 | 《IEEE sensors journal》 |
页码/总页数 | 9491-9499 / 9 |
语种/中图分类号 | 英语 / TP212 |
关键词 | Capacitance Sensors Capacitors Capacitive sensors Mathematical models Atmospheric modeling Analytical models |
DOI | 10.1109/JSEN.2022.3164452 |
馆藏号 | IELEP0232 |