摘要 : Erbium-ytterbium co-doped aluminium oxide (Al2O3:Er3+:Yb3+) thin films were deposited on thermally oxidized silicon wafers using reactive radio frequency co-sputtering deposition. The effects of deposition parameters (including ox... 展开 Erbium-ytterbium co-doped aluminium oxide (Al2O3:Er3+:Yb3+) thin films were deposited on thermally oxidized silicon wafers using reactive radio frequency co-sputtering deposition. The effects of deposition parameters (including oxygen flow rate, substrate temperature and substrate bias) were investigated to obtain low loss Al2O3 films (-0.15 dB/cm at 1550 nm). A set of singlyand co-doped Al2O3 films (surface roughness:-144.8 p.m.) with various Er3+ concentrations (1.4, 2.0 and 2.5 x 10(20) cm(-3)) and/or Yb3+ concentrations (1.3, 2.1, 3.2, 4.3 and 5.8 x 1020 cm(-3)) were deposited and investigated. The Er3+ photoluminescence (PL) spectrum around 1550 nm exhibits a pump power-independent full width at half maximum (FWHM) of-40 nm with and without the presence of Yb3+ as a sensitizer. The luminescent lifetime of Er3+ (I-4(13/2), 6.52-7.14 m s) exhibits a power dependent characteristic, while that of Yb3+ (I-2(5/2), 0.514-0.716 m s) is power-independent. A power dependent role of energy transfer upconversion is concluded from both the power-dependent Er3+ PL intensity trend and its power-dependent PL decay rate. Yb3+-Er3+ ion energy transfer also exhibits power dependent characteristics. The energy transfer coefficient (up to-3.2 x 10(-17) cm(3)s(1)) and energy transfer efficiency (up to-80%) depend on the Yb3+ and Er3+ concentrations. The PL intensity trend and power dependent absorption of Er3+ and Er3+-Yb3+ under 1469-nm excitation can be well described by using a three-energy-level model. The derived Er3+ quenching fraction based on the fittings of the measured absorption and PL intensity, decreases with the presence of Yb3+ ions. In addition, the Yb3+ quenching fraction was derived based on a two-energy-level model for 973-nm absorption. This work provides parametric references and insights regarding deposition, characterization, and design of the evolving rare-earth-doped Al2O3 platform for on-chip near-infrared applications. 收起