摘要 : We fabricated large-area stacked complementary plasmonic crystals (SC PICs) by employing ultraviolet nanoimprint lithography. The SC PICs were made on silicon-on-insulator substrates consisting of three layers: the top layer conta... 展开
作者 | Bongseok Choi Masanobu lwanaga Hideki T. Miyazaki Kazuaki Sakoda Yoshimasa Sugimoto |
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作者单位 | |
期刊名称 | 《Journal of micro/nanolithography, MEMS, and MOEMS》 |
页码/总页数 | 023007.1-023007.6 / 6 |
语种 | 英语 |
关键词 | plasmonic crystals plasmonic resonance photoluminescence enhancement nanoimprint lithography large-area fabrication |
DOI | 10.1117/1.JMM.13.2.023007 |
馆藏号 | TN-268 |