[机翻] 纳米压印光刻制备光致发光增强等离子体基片
    [期刊]
  • 《Journal of micro/nanolithography, MEMS, and MOEMS》 2014年13卷2期

摘要 : We fabricated large-area stacked complementary plasmonic crystals (SC PICs) by employing ultraviolet nanoimprint lithography. The SC PICs were made on silicon-on-insulator substrates consisting of three layers: the top layer conta... 展开

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