摘要 : High performance super TFTs with different channel widths and lengths, formed by a novel grain enhancement method, are reported. High temperature annealing has been utilized to enhance the polysilicon grain and improve the quality... 展开
作者 | Wang~ H. Chan~ M. |
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期刊名称 | 《IEEE Transactions on Electron Devices》 |
页码/总页数 | P.1580-1586 / 7 |
语种/中图分类号 | 英语 / TM10 TN |
关键词 | Thin film transistors |
DOI | 10.1109/16.853034 |
馆藏号 | IELEP0099 |