摘要 : We present a silicon monolithic array of 60 photon counters (single-photon avalanche diode array) for two-dimensional imaging, with detection efficiency higher than 30% in the visible range. The fabricated solid-state array is rug... 展开 We present a silicon monolithic array of 60 photon counters (single-photon avalanche diode array) for two-dimensional imaging, with detection efficiency higher than 30% in the visible range. The fabricated solid-state array is rugged and easy to be integrated in the optical system. It is free from readout noise and provides very fast frame rates and nanosecond gating. The detection electronics includes integrated active quenching circuits for each pixel of the array. We report the optical and electrical characterization of both array detectors and associated electronics. 收起