摘要 : The behavior of the ground state neutral and singly ionized atoms is studied in multipulse high power impulse magnetron sputtering processes. The time-resolved two-dimensional laser induced fluorescence was used for imaging the di... 展开
作者 | Hnilica~ J. Klein~ P. Vasina~ P. Snyders~ R. Britun~ N. |
---|---|
作者单位 | |
期刊名称 | 《Plasma Sources Science & Technology》 |
总页数 | 12 |
语种/中图分类号 | 英语 / O53 |
关键词 | sputtering multipulse HiPIMS discharge LIF AAS THIN-FILMS DEPOSITION RATE PULSED DC POWER COATINGS PLASMA ENHANCEMENT TRANSPORT |
馆藏号 | N2008EPST0011348 |