摘要: This paper reported a novel high sensitivity and linearity 0-3 kPa piezoresistive pressure sensor by carefully trading off the stress on the beam edge and the deflection of the sensing diaphragm. A shuriken-structured diaphragm (S... 展开
作者 | Taotao Guan Fang Yang Wei Wang Xian Huang Boyan Jiang Jun He Li Zhang Fengshan Fu Dan Li Rui Li Qiancheng Zhao Dacheng Zhang | ||
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作者单位 | |||
文集名称 | 2016 IEEE 29th international conference on micro electro mechanical systems | ||
出版年 | 2016 | ||
出版社/出版地 | Institute of Electrical and Electronics Engineers / Piscataway | ||
会议名称 | International Conference on Micro Electro Mechanical Systems | ||
开始页/总页数 | 816 / 4 | ||
会议日期/会议地点 | 20160124-28 / Shanghai | 会议年/会议届次 | 2016 / 29th |
中图分类号 | TP271.4-53 | ||
关键词 | sensitivity linearity linearity | ||
馆藏号 | N2016072700089730 |