摘要 : We have developed a high frequency (40 MHz) plasma-enhanced chemical vapor deposition (PECVD) system for large-area and high-rate deposition of hydrogenated microcrystalline silicon (μc-Si:H). The large-area and high-rate depositi... 展开
作者 | You Bong Lim Doo Sup Hwang Jun Oh Lee Jeong Hoon Lee Hoon Hee Kim Woo Sok Chang |
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作者单位 | |
期刊名称 | 《International Journal of Precision Engineering and Manufacturing》 |
总页数 | 4 |
语种/中图分类号 | 英语 / TH7 |
关键词 | Cooling Radiation Conduction PECVD Thin film solar cell RF Plasma Heating Large area deposition High deposition rate Microcrystalline silicon |
馆藏号 | N2009EPST0003168 |