国际刊号:
0894-6507
出版周期:
4 issues a year
序号 | 标题 | 作者 | 起始页 | 操作 |
---|---|---|---|---|
1 | IEEE Transactions on Semiconductor Manufacturing Publication Information | |||
2 | Table of Contents | |||
3 | IEEE Transactions on Semiconductor Manufacturing Information for Authors | |||
4 | Editorial | Reha Uzsoy | 1 | |
5 | Editorial | Jeanne P. Bickford, Dragan Djurdjanovic, Mahadeva Iyer Natarajan | 2 | |
6 | Learning Priority Indices for Energy-Aware Scheduling of Jobs on Batch Processing Machines | Daniel Sascha Schorn, Lars Mönch | 3 | |
7 | Practical Reinforcement Learning for Adaptive Photolithography Scheduler in Mass Production | Eungjin Kim, Taehyung Kim, Dongcheol Lee... | 16 | |
8 | Integrated Scheduling of Jobs, Tools, Machines, and Two Different Set of Transbots | Andy Ham, Myoung-Ju Park, John Fowler | 27 | |
9 | Gas-Delivery Fluid-Mechanical Timescales in Semiconductor Manufacturing | E. Gonzalez-Juez | 38 | |
10 | Machine Learning on Multiplexed Optical Metrology Pattern Shift Response Targets to Predict Electrical Properties | Thomas J. Ashby, Vincent Truffert, Dorin Cerbu... | 46 |