摘要 : Hafnium beta-diketonatochlorides HfCl2(thd)(2) (1), HfCl(thd)(3) (2) as well as beta-diketonato-silylamide and/or siloxide derivatives of 1 namely Hf(thd)(2)[N(SiMe3)(2)](2) (3), Hf(thd)(2)(OSiMe3)(2) (4) and Hf(thd)(2)(OSi'BuMe2)... 展开
作者 | Hubert-Pfalzgraf LG Touati N Pasko SV Vaissermann J Abrutis A |
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作者单位 | |
期刊名称 | 《Polyhedron: The International Journal for Inorganic and Organometallic Chemistry》 |
总页数 | 8 |
语种/中图分类号 | 英语 / O6 |
关键词 | hafnium silicate diketonate silyloxide silylamide MOCVD structure CHEMICAL-VAPOR-DEPOSITION OXIDE-FILMS SINGLE-SOURCE THIN-FILMS ELECTRICAL-PROPERTIES GATE DIELECTRICS SIO2 |
馆藏号 | N2008EPST0009958 |