摘要 : Deep ultra-violet optical fibers are fabricated using modified SiO{sup}2 glasses containing 2000 ppm fluorine for the cladding and 200 ppm for the core. The transmission at 193 nm is improved to more than 60%/m by optimizing the f... 展开 Deep ultra-violet optical fibers are fabricated using modified SiO{sup}2 glasses containing 2000 ppm fluorine for the cladding and 200 ppm for the core. The transmission at 193 nm is improved to more than 60%/m by optimizing the fiber drawing conditions. The hydrogen impregnation into the fiber suppresses the degradation of the transmission by irradiation of ArF eximer laser (50 mJ/cm{sup}2/pulse). Further improvement maybe expected by reducing oxygen-deficient center (I) defect generation in the drawing process. 收起