摘要: Electron and negative ion densities have been measured in inductively coupled discharges containing C2F6 and CHF3. Line integrated electron density was determined using a microwave interferometer, negative ion densities were infer... 展开
作者 | Hebner Miller | ||
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原报告号 | DE00015163 | 总页数 | 28 |
主办者 | Department of Energy, Washington, DC. | ||
报告分类号 | [99F: Chemistry: Physical & Theoretical Chemistry] | ||
报告类别/文献类型 | DE / NTIS科技报告 | ||
关键词 | Electron density Ion density Electron discharge |