摘要: Ultrafine e grain amorphous silicon nitride (Si3N4) powders were produced via direct nitridation process of silicon powders in transport bed. The properties of the nitridation products, such as morphology, phase composition, chemi... 展开 Ultrafine e grain amorphous silicon nitride (Si3N4) powders were produced via direct nitridation process of silicon powders in transport bed. The properties of the nitridation products, such as morphology, phase composition, chemical composition and structure, were examined using standard characterization techniques (SEM, XRD, FTIR, etc). The experimental results showed, in the case of silicon powders with particle size of 2.7μm, the conversion rate of silicon was 53.4% at reaction temperature of 1380℃ and reaction time of 2.7minutes, and the products mainly comprised amorphous silicon nitride powders. 收起