摘要: In many coating chambers substrates are moved by simple or planetary rotary motion systems. Isaac Newton already taught that an object in uniform motion tends to stay in uniform motion unless acted upon by a net external force. To... 展开 In many coating chambers substrates are moved by simple or planetary rotary motion systems. Isaac Newton already taught that an object in uniform motion tends to stay in uniform motion unless acted upon by a net external force. To move a substrate on a rotary trajectory, centripetal and gravitational forces must act upon the substrate. The substrate must be somehow confined. Confinement options range from firm attachment to a fixture to loose placement in a pocket. Depending on the rotary motion pattern, a loosely held substrate may slide once against a confinement boundary and then stay, or may constantly slide around. 'Rattling around' may be undesirable as it could lead to edge destruction, debris formation, precession of the substrate, and other adverse effects. Firm attachment is advantageous in most cases, but often adds process complexity. We examine the forces present on substrates in typical rotary motion systems and discuss the implications of different confinement methods. 收起