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An analysis of non-uniform stress states in finite thin film/substrate system: The need of full-field curvature measurements.

[学位论文]

Ngo, Duc Minh.
University of Illinois at Urbana-Champaign.

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ISBN	9781109584769
作者	Ngo, Duc Minh.	授予学位单位	University of Illinois at Urbana-Champaign.
导师	Huang, Yonggang,	学位	Ph.D.
学科	Engineering Mechanical.	国籍	US
页码/总页数	92 p. / 92	出版年	2009
中图分类号	TH
关键词	Multilayer films Nonuniform curvatures Nonuniform misfit strain Nonuniform thickness Stoney formula Thin films

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