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Experimental studies of radical-surface interactions.

[学位论文]

Kimura, Yoshie.
University of California Berkeley.

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ISBN	9780542294389
作者	Kimura, Yoshie.	授予学位单位	University of California Berkeley.
导师	Graves, David B.,	学位	Ph.D.
学科	Engineering Chemical.	国籍	US
页码/总页数	156 p. / 156	出版年	2005
中图分类号	TQ02
关键词	Plasma Radical-surface interactions Semiconductor Surface science

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