摘要 : This article reports the development and characterization of a piezoresistive silicon MEMS nanomechanical membrane-flexure (NMF) sensor and its application for the detection of hydrogen gas. The electromechanical transduction of t... 展开
作者 | B. S. Tina S. Rohith V. Seena |
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作者单位 | |
页码/总页数 | 5440-5447 / 8 |
语种/中图分类号 | 英语 / TP212 |
关键词 | Sensors Sensor phenomena and characterization Electromechanical sensors Optical sensors Sensitivity Silicon Piezoresistance |
DOI | 10.1109/JSEN.2024.3351198 |
馆藏号 | IELEP0232 |