摘要 : In this work, vertical gallium nitride (GaN) trench Junction Barrier Schottky (JBS) diodes fabricated with a novelty slanted p-GaN sidewall on a 2-inch free-standing GaN (FS-GaN) substrate were demonstrated. The slanted sidewall o... 展开
作者 | Xinke Liu Bo Li Junye Wu Jian Li Wen Yue Renqiang Zhu Qi Wang Xiaohua Li Jianwei Ben Wei He Hsien-Chin Chiu Ke Xu Ze Zhong |
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作者单位 | |
页码/总页数 | 34-38 / 5 |
语种/中图分类号 | 英语 / TN |
关键词 | Schottky diodes Gallium nitride Electric fields Substrates Etching Anodes Junctions |
DOI | 10.1109/JEDS.2023.3340512 |
馆藏号 | IELEP0399 |