摘要 : This article describes an rf ion source with a back-streaming electron dump. A quartz tube, brazed to a metal plug at one end, is fused in the center of a flat quartz plate. rf power (at 13.6 MHz) is coupled to generate hydrogen p... 展开 This article describes an rf ion source with a back-streaming electron dump. A quartz tube, brazed to a metal plug at one end, is fused in the center of a flat quartz plate. rf power (at 13.6 MHz) is coupled to generate hydrogen plasma using a planar external antenna bonded to the window. Bonding the water-cooled rf antenna to the quartz window significantly lowers its temperature. The water-cooled metal plug serves as the back-streaming electron dump. At 1800 W, the current density of extracted hydrogen ions reaches approximately 125 mA/cm2</sup>. © 2010 American Institute of Physics Article Outline INTRODUCTION RF-DRIVEN ION SOURCE WITH A BACK-STREAMING ELECTRON DUMP Ion source design Optimization of rf antenna Rf window engineering ANSYS simulation Measured temperature of quartz rf window EXPERIMENTAL RESULTS Atomic ion fraction Extracted current density Electron current measured on beam dump SUMMARY 收起