摘要 : The electromagnetic field (both E and B fields) is calculated for a solenoidal inductively coupled plasma (ICP) discharge. The model is based on two-dimensional cylindrical coordinates, and the finite difference method is used for... 展开 The electromagnetic field (both E and B fields) is calculated for a solenoidal inductively coupled plasma (ICP) discharge. The model is based on two-dimensional cylindrical coordinates, and the finite difference method is used for solving Maxwell equations in both the radial and axial directions. Through one-turn coil measurements, assuming that the electrical conductivity has a constant value in each cross section of the discharge tube, the calculated E and B fields rise sharply near the tube wall. The nonuniform radial distributions imply that the skin effect plays a significant role in the energy balance of the stable ICP. Damped distributions in the axial direction show that the magnetic flux gradually dissipates into the surrounding space. A finite difference calculation allows prediction of the electrical conductivity and plasma permeability, and the induction coil voltage and plasma current can be calculated, which are verified for correctness. 收起