摘要 : Tantalum pentoxide(Ta_(2)O_(5)) has attracted intensive attention due to their excellent physicochemical properties.Ta_(2)O_(5) films were synthesized via electron beam evaporation(EBE)and subsequently annealed at different temper... 展开 Tantalum pentoxide(Ta_(2)O_(5)) has attracted intensive attention due to their excellent physicochemical properties.Ta_(2)O_(5) films were synthesized via electron beam evaporation(EBE)and subsequently annealed at different temperatures ranging from 300 to 900℃.X-ray diffraction(XRD)results show that amorphous Ta_(2)O_(5) thin films form from 300 to 700℃ and then a phase transition to polycrystalline β-Ta_(2)O_(5) films occurs since 900℃.The surface morphology of the Ta_(2)O_(5) films is uniform and smooth.The resulted Ta_(2)O_(5)films exhibit excellent transmittance properties for wavelengths ranging from 300 to 1100 nm.The bandgap of the Ta_(2)O_(5) films is broadened from 4.32 to 4.46 eV by annealing.The 900℃ polycrystalline film electrode has improved electrochemical stability,compared to the other amorphous counterparts. 收起