提出一种像素级源跟随管共享、双列线信号传输的红外焦平面读出电路新结构.像素的电压信号通过两条列线传递到列级,消除了列线寄生电阻带来的非均匀性和非线性.同一列的相邻四行像素共享源跟随管,增大了源跟随管的尺寸和面积,从而降低了热噪声、闪烁噪声以及工艺偏差带来的非均匀性.采用该结构并基于0.35μm 2P3M CMOS工艺设计和制造了一款640×512规格读出电路,像素中心距为15μm.测试结果表明:功耗仅30 mW,动态范围81 dB,非线性度0.11％,非均匀性小于1％.与中波红外探测器阵列互连后进行了组件测试和成像实验,组件非均匀性小于5％,NETD为18 mK,获得了高质量红外图像.
A new readout circuit structure for infrared focal plane array with pixel-level shared source followerand double column buses is proposed in this paper. The voltage signal of the pixel is transferred through double column buses instead of single column bus,and therefore the non-uniformity and non-linearity caused by the para-sitic resistor of the column bus is eliminated. By sharing the source follower within four adjacent pixels in the same column,the aspect ratio(W/L)and area of the source follower are increased to suppress the thermal noise, flicker noise and non-uniformity caused by process. A 640×512 readout circuit using this structure is designed and fabricated in 0. 35μm 2P3M CMOS process and the pixel pitch is 15μm. The test results indicate the readout cir-cuit receives a high dynamic range(DR)of 81dB high-quality infrared images with a low power consumption of 30mW. The nonlinearity is 0. 11％,and the non-uniformity is less than 1％. Medium-wave infrared detector as-sembly is fabricated and tested. The assembly' s non-uniformity is less than 5％ and the NETD is 18mK. High-quality infrared images are obtained.
牛育泽;朱雅珺;鲁文高;顾雨婷;张雅聪;陈中建
北京大学微纳电子学系微电子器件与电路教育部重点实验室,北京 100871北京大学(天津滨海)新一代信息技术研究院,天津 300452
信息技术与安全科学
红外焦平面;读出电路;源跟随管共享;双列线
IRFPA;ROIC;shared source follower;double column buses
《红外与毫米波学报》 2020 (003)
324-330 / 7
Supported by the National Natural Science Foundation of China(61973008,61976009);
10.11972/j.issn.1001-9014.2020.03.010
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